High performance system-on-chip discrete components using post passivation process

ABSTRACT

A system and method for forming post passivation discrete components, is described. High quality discrete components are formed on a layer of passivation, or on a thick layer of polymer over a passivation layer.

This application is a Continuation-In-Part of Ser. No. 10/303,451,filing date Nov. 25, 2002, which is a continuation of Ser. No.10/156,590, filed on May 28, 2002, now issued as U.S. Pat. No.6,489,647, which is a Divisional Application of Ser. No. 09/970,005,filing date Oct. 3, 2001, now U.S. Pat. 6,455,885, which is a DvisionalApplication of Ser. No. 09/721,722, filing date Nov. 27, 2000, now U.S.Pat. No. 6,303,423, which is a continuation-in-part of Ser. No.09/637,926, filing date Aug. 14, 2000, now abandoned, which is acontinuation-in-part of Ser. No. 09/251,183, filing date Feb. 17, 1999,now issued as U.S. Pat. 6,383,916 B1, which is a continuation-in-part ofSer. No. 09/216,791, filing date Dec. 21, 1998, now abandoned, assingnedto common assignee.

RELATED PATENT APPLICATIONS

This application is related to Ser. No. 10/445,558, filed on May 27,2003, and assigned to a common assignee.

This application is related to Ser. No. 10/445,449, filed on May 27,2003, and assigned to a common assignee.

BACKGROUND OF THE INVENTION

(1) Field of the Invention

The invention relates to the manufacturing of high performanceIntegrated Circuit (IC's), and, more specifically, to methods ofcreating high performance electrical components (such as an inductor) onthe surface of a semiconductor substrate by reducing the electromagneticlosses that are typically incurred in the surface of the substrate.

(2) Description of the Related Art

The continued emphasis in the semiconductor technology is to createimproved performance semiconductor devices at competitive prices. Thisemphasis over the years has resulted in extreme miniaturization ofsemiconductor devices, made possible by continued advances ofsemiconductor processes and materials in combination with new andsophisticated device designs. Most of the semiconductor devices that areat this time being created are aimed at processing digital data. Thereare however also numerous semiconductor designs that are aimed atincorporating analog functions into devices that simultaneously processdigital and analog data, or devices that can be used for the processingof only analog data. One of the major challenges in the creation ofanalog processing circuitry (using digital processing procedures andequipment) is that a number of the components that are used for analogcircuitry are large in size and are therefore not readily integratedinto devices that typically have feature sizes that approach thesub-micron range. The main components that offer a challenge in thisrespect are capacitors and inductors, since both these components are,for typical analog processing circuits, of considerable size.

A typical application for inductors of the invention is in the field ofmodern mobile communication applications. One of the main applicationsof semiconductor devices in the field of mobile communication is thecreation of Radio Frequency (RF) amplifiers. RF amplifiers contain anumber of standard components, a major component of a typical RFamplifier is a tuned circuit that contains inductive and capacitivecomponents. Tuned circuits form, dependent on and determined by thevalues of their inductive and capacitive components, an impedance thatis frequency dependent, enabling the tuned circuit to either present ahigh or a low impedance for signals of a certain frequency. The tunedcircuit can therefore either reject or pass and further amplifycomponents of an analog signal, based on the frequency of thatcomponent. The tuned circuit can in this manner be used as a filter tofilter out or remove signals of certain frequencies or to remove noisefrom a circuit configuration that is aimed at processing analog signals.The tuned circuit can also be used to form a high electrical impedanceby using the LC resonance of the circuit and to thereby counteract theeffects of parasitic capacitances that are part of a circuit. One of theproblems that is encountered when creating an inductor on the surface ofa semiconductor substrate is that the self-resonance that is caused bythe parasitic capacitance between the (spiral) inductor and theunderlying substrate will limit the use of the inductor at highfrequencies. As part of the design of such an inductor it is thereforeof importance to reduce the capacitive coupling between the createdinductor and the underlying substrate.

At high frequencies, the electromagnetic field that is generated by theinductor induces eddy currents in the underlying silicon substrate.Since the silicon substrate is a resistive conductor, the eddy currentswill consume electromagnetic energy resulting in significant energyloss, resulting in a low Q inductor. This is one of the main reasons fora low Q value of a inductor, whereby the resonant frequency of 1/√(LC)limits the upper boundary of the frequency. In addition, the eddycurrents that are induced by the inductor will interfere with theperformance of circuitry that is in close physical proximity to theinductor. Furthermore, the fine metal lines used to form the inductoralso consume energy, due to the metal's resistance, and result in low Qinductors.

It has already been pointed out that one of the key components used increating high frequency analog semiconductor devices is the inductorthat forms part of an LC resonance circuit. In view of the high devicedensity that is typically encountered in semiconductor devices and thesubsequent intense use of the substrate surface area, the creation ofthe inductor must incorporate the minimization of the surface area thatis required for the inductor, while at the same time maintaining a highQ value for the inductor. Typically, inductors that are created on thesurface of a substrate are of a spiral shape whereby the spiral iscreated in a plane that is parallel with the plane of the surface of thesubstrate. Conventional methods that are used to create the inductor onthe surface of a substrate suffer several limitations. Most high Qinductors form part of a hybrid device configuration or of MonolithicMicrowave Integrated Circuits (MMIC's) or are created as discretecomponents, the creation of which is not readily integratable into atypical process of Integrated Circuit manufacturing. It is clear that,by combining the creation on one semiconductor monolithic substrate ofcircuitry that is aimed at the functions of analog data manipulation andanalog data storage with the functions of digital data manipulation anddigital data storage, a number of significant advantages can beachieved. Such advantages include the reduction of manufacturing costsand the reduction of power consumption by the combined functions. Thespiral form of the inductor that is created on the surface of asemiconductor substrate however results, due to the physical size of theinductor, in parasitic capacitances between the inductor wiring and theunderlying substrate and causes electromagnetic energy losses in theunderlying resistive silicon substrate. These parasitic capacitanceshave a serious negative effect on the functionality of the created LCcircuit by sharply reducing the frequency of resonance of the tunedcircuit of the application.

More seriously, the inductor-generated electromagnetic field will induceeddy currents in the underlying resistive silicon substrate, causing asignificant energy loss that results in low Q inductors.

The performance parameter of an inductor is typically indicated is theQuality (Q) factor of the inductor. The quality factor Q of an inductoris defined as Q=Es/El, wherein Es is the energy that is stored in thereactive portion of the component while El is the energy that is lost inthe reactive portion of the component. The higher the quality of thecomponent, the closer the resistive value of the component approacheszero while the Q factor of the component approaches infinity. Forinductors that are created overlying a silicon substrate, theelectromagnetic energy that is created by the inductor will primarily belost in the resistive silicon of the underlying substrate and in themetal lines that are created to form the inductor. For components, thequality factor serves as a measure of the purity of the reactance (orthe susceptance) of the component, which can be degraded due to theresistive silicon substrate, the resistance of the metal lines anddielectric losses. In an actual configuration, there are always somephysical resistors that will dissipate power, thereby decreasing thepower that can be recovered. The quality factor Q is dimensionless. A Qvalue of greater than 100 is considered very high for discrete inductorsthat are mounted on the surface of Printed Circuit Boards. For inductorsthat form part of an integrated circuit, the Q value is typically in therange between about 3 and 10.

In creating an inductor on a monolithic substrate on which additionalsemiconductor devices are created, the parasitic capacitances that occuras part of this creation limit the upper bound of the cut-off frequencythat can be achieved for the inductor using conventional siliconprocesses. This limitation is, for many applications, not acceptable.Dependent on the frequency at which the LC circuit is designed toresonate, significantly larger values of quality factor, such as forinstance 50 or more, must be available. Prior Art has in this beenlimited to creating values of higher quality factors as separate units,and in integrating these separate units with the surrounding devicefunctions. This negates the advantages that can be obtained when usingthe monolithic construction of creating both the inductor and thesurrounding devices on one and the same semiconductor substrate. Thenon-monolithic approach also has the disadvantage that additional wiringis required to interconnect the sub-components of the assembly, therebyagain introducing additional parasitic capacitances and resistive lossesover the interconnecting wiring network. For many of the applications ofa RF amplifier, such as portable battery powered applications, powerconsumption is at a premium and must therefore be as low as possible. Byraising the power consumption, the effects of parasitic capacitances andresistive power loss can be partially compensated, but there arelimitations to even this approach. These problems take on even greaterurgency with the rapid expansion of wireless applications, such asportable telephones and the like. Wireless communication is a rapidlyexpanding market, where the integration of RF integrated circuits is oneof the most important challenges. One of the approaches is tosignificantly increase the frequency of operation to for instance therange of 10 to 100 GHz. For such high frequencies, the value of thequality factor obtained from silicon-based inductors is significantlydegraded. For applications in this frequency range, monolithic inductorshave been researched using other than silicon as the base for thecreation of the inductors. Such monolithic inductors have for instancebeen created using sapphire or GaAs as a base. These inductors haveconsiderably lower substrate losses than their silicon counterparts (noeddy current, hence no loss of electromagnetic energy) and thereforeprovide much higher Q inductors. Furthermore, they have lower parasiticcapacitance and therefore provide higher frequency operationcapabilities. Where however more complex applications are required, theneed still exists to create inductors using silicon as a substrate. Forthose applications, the approach of using a base material other thansilicon has proven to be too cumbersome while for instance GaAs as amedium for the creation of semiconductor devices is as yet a technicalchallenge that needs to be addressed. It is known that GaAs is asemi-insulating material at high frequencies, reducing theelectromagnetic losses that are incurred in the surface of the GaAssubstrate, thereby increasing the Q value of the inductor created on theGaAs surface. GaAs RF chips however are expensive, a process that canavoid the use of GaAs RF chips therefore offers the benefit of costadvantage.

A number of different approaches have been used to incorporate inductorsinto a semiconductor environment without sacrificing device performancedue to substrate losses. One of these approaches has been to selectivelyremove (by etching) the silicon underneath the inductor (using methodsof micro machining), thereby removing substrate resistive energy lossesand parasitic effects. Another method has been to use multiple layers ofmetal (such as aluminum) interconnects or of copper damasceneinterconnects.

Other approaches have used a high resistivity silicon substrate therebyreducing resistive losses in the silicon substrate. Resistive substratelosses in the surface of the underlying substrate form a dominant factorin determining the Q value of silicon inductors. Further, biased wellshave been proposed underneath a spiral conductor, this again aimed atreducing inductive losses in the surface of the substrate. A morecomplex approach has been to create an active inductive component thatsimulates the electrical properties of an inductor as it is applied inactive circuitry. This latter approach however results in high powerconsumption by the simulated inductor and in noise performance that isunacceptable for low power, high frequency applications. All of theseapproaches have as common objectives to enhance the quality (Q) value ofthe inductor and to reduce the surface area that is required for thecreation of the inductor. The most important consideration in thisrespect is the electromagnetic energy losses due to the electromagneticinduced eddy currents in the silicon substrate.

When the dimensions of Integrated Circuits are scaled down, the cost perdie is decreased while some aspects of performance are improved. Themetal connections which connect the Integrated Circuit to other circuitor system components become of relative more importance and have, withthe further miniaturization of the IC, an increasingly negative impacton circuit performance. The parasitic capacitance and resistance of themetal interconnections increase, which degrades the chip performancesignificantly. Of most concern in this respect is the voltage drop alongthe power and ground buses and the RC delay of the critical signalpaths. Attempts to reduce the resistance by using wider metal linesresult in higher capacitance of these wires.

Current techniques for building an inductor on the surface of asemiconductor substrate use fine-line techniques whereby the inductor iscreated under a layer of passivation. This however implies closephysical proximity between the created inductor and the surface of thesubstrate over which the inductor has been created (typically less than10 μm), resulting in high electro-magnetic losses in the siliconsubstrate which in turn results in reducing the Q value of the inductor.

U.S. Pat. No. 5,212,403 (Nakanishi) shows a method of forming wiringconnections both inside and outside (in a wiring substrate over thechip) for a logic circuit depending on the length of the wireconnections.

U.S. Pat. No. 5,501,006 (Gehman, Jr. et a].) shows a structure with aninsulating layer between the integrated circuit (IC) and the wiringsubstrate. A distribution lead connects the bonding pads of the IC tothe bonding pads of the substrate.

U.S. Pat. No. 5,055,907 (Jacobs) discloses an extended integrationsemiconductor structure that allows manufacturers to integrate circuitrybeyond the chip boundaries by forming a thin film multi-layer wiringdecal on the support substrate and over the chip. However, thisreference differs from the invention.

U.S. Pat. No. 5,106,461 (Volfson et al.) teaches a multi layerinterconnect structure of alternating polyimide (dielectric) and metallayers over an IC in a TAB structure.

U.S. Pat. No. 5,635,767 (Wenzel et al.) teaches a method for reducing RCdelay by a PBGA that separates multiple metal layers.

U.S. Pat. No. 5,686,764 (Fulcher) shows a flip chip substrate thatreduces RC delay by separating the power and I/O traces.

U.S. Pat. No. 6,008,102 (Alford et al.) shows a helix inductor using twometal layers connected by vias.

U.S. Pat. No. 5,372,967 (Sundaram et al.) discloses a helix inductor.

U.S. Pat. No. 5,576,680 (Ling) and U.S. Pat. No. 5,884,990 (Burghartz etal.) show other helix inductor designs.

SUMMARY OF THE INVENTION

It is the primary objective of the invention to improve the RFperformance of High Performance Integrated Circuits.

Another objective of the invention is to provide a method for thecreation of a high-Q inductor.

Another objective of the invention is to replace the GaAs chip with asilicon chip as a base on which a high-Q inductor is created.

Yet another objective of the invention is to extend the frequency rangeof the inductor that is created on the surface of a silicon substrate.

It is yet another objective of the invention to create high qualitypassive electrical components overlying the surface of a siliconsubstrate.

The above referenced U.S. Pat. No. 6,383,916 adds, in a post passivationprocessing sequence, a thick layer of dielectric over a layer ofpassivation and layers of wide and thick metal lines on top of the thicklayer of dielectric. The present invention extends referenced U.S. Pat.No. 6,383,916 by in addition creating high quality electricalcomponents, such as an inductor, a capacitor or a resistor, on a layerof passivation or on the surface of a thick layer of dielectric. Inaddition, the process of the invention provides a method for mountingdiscrete passive electrical components on the surface of IntegratedCircuit chips.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross sectional representation of the interconnection schemeshown in U.S. Pat. No. 6,383,916.

FIG. 2 is a cross sectional representation of an inductor of theinvention, created on a thick layer of polyimide.

FIG. 3 is a top view of an inductor created following the process of theinvention.

FIG. 4 is a cross sectional representation of a substrate and overlyinglayers, an inductor has been created on the surface of a thick layer ofpolyimide, a layer of conductive material has been added to furtherinsulate the inductor from the underlying silicon substrate.

FIG. 5 a shows an inductor of the invention above a layer ofpassivation.

FIGS. 5 b-5 c are a cross-sectional representation, and top view,respectively, of inductors of the invention formed on an isolatedsection of polymer.

FIG. 6 a is a cross sectional representation of a transformer accordingto the invention, formed over a polymer layer, over a layer ofpassivation.

FIG. 6 b is a cross sectional representation of a transformer accordingto the invention, with the bottom coil formed on a layer of passivation.

FIG. 6 c is a three dimensional view of another embodiment of asolenoidal inductor of the invention, over a passivation layer.

FIG. 6 d is a three-dimensional view of a solenoidal inductor of theinvention, formed over a polymer layer, over a passivation layer.

FIG. 6 e is a top view of the inductors of FIGS. 6 c and 6 d.

FIG. 6 f is a cross sectional representation of the structure of FIG. 6e, taken along the line 6 f-6 f′ of FIG. 6 e.

FIG. 6 g is a three dimensional view of an inductor of the invention, inthe shape of a toroid.

FIG. 6 h is a top view of the toroidal inductor of FIG. 6 g.

FIGS. 7 a-7 c is a cross sectional representation of a capacitor of theinvention, formed over a polymer layer over passivation.

FIG. 8 is a cross sectional representation of a resistor of theinvention, formed over a passivation layer.

FIGS. 9 a-9 b are cross sectional representations of a resistor of theinvention, formed over a thick polymer layer, over a passivation layer.

FIG. 10 is a cross sectional representation of a silicon substrate overwhich a discrete electrical component has been mounted, on the top of athick polymer layer, using surface mount technology.

FIG. 11 is a cross sectional representation of a silicon substrate,having a passivation layer on the surface of which a discrete electricalcomponent has been mounted, using surface mount technology.

FIGS. 12-18 depict, in cross-sectional form, the creation of gold metalstructures of the invention, through a layer of polymer.

FIGS. 19-23 depict the creation of copper metal structures of theinvention, through a layer of polymer.

FIGS. 24 a-24 c show alternate methods of connecting to the inductor ofthe invention.

FIGS. 25 and 26 show extended methods of connecting a capacitor and aresistor under the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

U.S. Pat. No. 6,383,916, assigned to a common assignee as the currentinvention, teaches an Integrated Circuit structure where re-distributionand interconnect metal layers are created in layers of dielectric overthe passivation layer of a conventional Integrated Circuit (IC). A layerof passivation is deposited over the IC, a thick layer of polymer isalternately deposited over the surface of the layer of passivation, andthick, wide metal lines are formed over the passivation.

U.S. Pat. No. 6,303,423, also assigned to a common assignee as thecurrent invention, addresses, among other objectives, the creation of aninductor whereby the emphasis is on creating an inductor of high Q valueabove the passivation layer of a semiconductor substrate. The highquality of the inductor of the invention allows for the use of thisinductor in high frequency applications while incurring minimum loss ofpower. The invention further addresses the creation of a capacitor and aresistor on the surface of a silicon substrate whereby the mainobjective (of the process of creating a capacitor and resistor) is toreduce parasitics that are typically incurred by these components in theunderlying silicon substrate.

Referring now more specifically to FIG. 1, there is shown a crosssection of one implementation of U.S. Pat. No. 6,383,916. The surface ofsilicon substrate 10 has been provided with transistors 11 and otherdevices (not shown in FIG. 1). The surface of substrate 10 is covered bya interlevel dielectric (ILD) layer 12, formed over the devices.

Layers 14 represent metal and dielectric layers that are typicallycreated over ILD 12. Layers 14 contain one or more layers of dielectric,interspersed with one or more metal interconnect lines 13 that make up anetwork of electrical connections. At a top metal layer are points 16 ofelectrical contact. These points 16 of electrical contact can establishelectrical interconnects to the transistors and other devices 11 thathave been provided in and on the surface of the substrate 10. Apassivation layer 18, formed of, for example, a composite layer ofsilicon oxide and silicon nitride, is deposited over the surface oflayers 14, and function to prevent the penetration of mobile ions (suchas sodium ions), moisture, transition metal (such as gold, copper,silver), and other contamination. The passivation layer is used toprotect the underlying devices (such as transistors, polysiliconresistors, poly-to-poly capacitors, etc.) and the fine-line metalinterconnection.

The key steps of U.S. Pat. No. 6,383,916, begin with the deposition of athick layer 20 of polyimide that is deposited over the surface ofpassivation layer 18. Access must be provided to points of electricalcontact 16, for this reason a pattern of openings 22, 36 and 38 isformed through the polyimide layer 20 and the passivation layer 18, thepattern of openings 22, 36 and 38 aligns with the pattern of electricalcontact points 16. Contact points 16 are, by means of the openings22/36/38 that are created in the layer 20 of polyimide, electricallyextended to the surface of layer 20.

Layer 20 is a polymer, and is preferably polyimide. Polymer 20 mayoptionally be photosensitive. Examples of other polymers that can beused include benzocyclobutene (BCB), parylene or epoxy-based materialsuch as photoepoxy SU-8 (available from Sotec Microsystems, Renens,Switzerland).

After formation of openings 22/36/38, metallization is performed tocreate patterned wide metal layers 26 and 28, and to connect to contactpoints 16. Lines 26 and 28 can be of any design in width and thicknessto accommodate specific circuit design requirements, which can be usedfor power distribution, or as a ground or signal bus. Furthermore, metal26 may be connected off-chip through wire bonds or solder bumps.

Contact points 16 are located on top of a thin dielectric (layers 14,FIG. 1), and the pad size must be kept small to minimize capacitancewith underlying metal layers. In addition, a large pad size willinterfere with the routing capability of the layer of metal.

Layer 20 is a thick polymer dielectric layer (for example, polyimide)having a thickness in excess of 2 μm (after curing). The range of thepolymer thickness can vary from 2 μm to 150 μm, dependent on electricaldesign requirements. For a thicker layer of polyimide, the polyimidefilm can be multiple coated and cured.

U.S. Pat. No. 6,383,916 B1 allows for the interconnection of circuitelements at various distances, over the path 30/32/34 shown in FIG. 1,using the thick, wide (as compared to the underlying “fine line”metallization in layers 14) metal of 28. Thick, wide metal 28 hassmaller resistance and capacitance than the fine line metal 14 and isalso easier and more cost effective to manufacture.

FIG. 2 shows how the interconnect aspect of U.S. Pat. No. 6,383,916, canbe modified to form an inductor on the surface of the thick layer 20 ofpolyimide. The inductor is created in a plane that is parallel with thesurface of the substrate 10 whereby this plane however is separated fromthe surface of the substrate 10 by the combined heights of layers 12,14, 18, and 20. FIG. 2 shows a cross section 40 of the inductor taken ina plane that is perpendicular to the surface of substrate 10. The wideand thick metal will also contribute to a reduction of the resistiveenergy losses. Furthermore, the low resistivity metal, such as gold,silver and copper, can be applied using electroplating, the thicknesscan be about 20 μm.

By increasing the distance between the inductor and the semiconductorsurface, as compared to prior art approaches in which the inductor isformed under the passivation, the electromagnetic field in the siliconsubstrate will be reduced as the distance is increased, and the Q valueof the inductor can be increased. The inductor overlies the layer ofpassivation and by, in addition, creating the inductor on the surface ofa thick layer of dielectric (such as a polymer) formed over thepassivation layer. In addition, by using wide and thick metal for thecreation of the inductor, the parasitic resistance is reduced.

In an important feature of the invention, the openings 19 in passivationlayer 18 may be as small as 0.1 μm wide. Thus, contact pads 16 may alsobe nearly as small, which allows for greater routing capability in thetop fine-line metallization layer, and lower capacitance.

In another important feature of the invention, the openings 22/36/38 inpolymer 20 are larger than the passivation openings 19. The polymeropenings 22/36/38 are aligned with passivation openings 19. The largerpolymer openings allow for relaxed design rules, simpler openingformation, and the use of a thick metal layer for the post-passivationmetallization of the invention.

FIG. 2 illustrates interconnect structure 26 as well as inductor 40,wherein the inductor includes two contacts 41 and 43, through polymerlayer 20 to contact pads 16.

In another feature of the invention, the FIG. 2 structure may be coveredby an additional layer of polymer (not shown).

FIGS. 24 a and 24 b illustrate another feature of the invention, inwhich contacts to the inductor are formed in a different manner than the2 downward contacts of FIG. 2. Specifically, in FIG. 24 a, a layer 35 ofdielectric, preferably polyimide or the like, is deposited overinterconnection 26 and inductor 40. An opening 36′ to one end of theinductor is then formed to expose one terminal of the inductor 40.Inductor 40 in FIG. 24 a thus can have one contact extending upward, anda second contact 40′ extending downward, in a “one-up, one-down”configuration.

FIG. 24 b illustrates another alternative, in which 2 upward contactopenings 36′ and 38′ are formed from inductor 40, in a “two-up”configuration.

In both FIGS. 24 a and 24 b, the upward contacts may be used forconnection to external devices or packaging, by way of wire bonding,solder bumps, or the like. For wire bonding an upper surface of inductor40 must be formed of a wire-bondable material such as Au or Al. Forsolder bump connection, under bump metallization (UBM) would be formedin the upward contact opening, followed by solder bump formation.

In either of the FIG. 24 a or 24 b configurations, interconnections toother contact pads on the same die (as opposed to connections toexternal devices, as described in the previous paragraph) may be madethrough openings 36′ and/or 38′, using similar metallization (but as anadditional layer) as used for structure 26 and inductor 40.

Referring now to FIG. 24 c, another feature of the invention is shown inwhich extension 89, connected to inductor 40, is used to relocate aninductor contact opening 36″ to another location on the die, such as atthe die edge. This may be useful for ease of wire bonding, for example.Opening 38″ is formed as earlier described. Extension 89 is formed atthe same time and of the same metallization as structure 26 and inductor40.

Similarly, extension 89 could be used to interconnect inductor 40 toanother contact point on the same die, by making a downward contact (notshown, but described earlier) instead of upward contact 36″.

If a contact to a center point of the inductor, such as that shown underopening 38″ in FIG. 24 c, is desired, then such contact cannot of coursebe made by an extension such as 40′, but instead must be either upwardor downward.

FIG. 3 shows a top view 42 of the spiral structure of the inductor 40that has been created on the surface of layer 20 of dielectric. Theinductor 40 cross section that is shown in FIG. 2 is taken along line2—2 of FIG. 3.

FIG. 4 shows a cross section of inductor 40 whereby the inductor hasbeen further isolated from the surface of the substrate 10 by theaddition of a conductive plate 44′, of conducting material, formed undersubstantially all of the inductor, and preferably formed of Cu (copper)or Au (gold). The surface area of the conductive plate 44′ typicallyextends over the surface of passivation layer 18 such that the inductor40 aligns with and overlays the conductive plate 44′, the surface areaof conductive plate 44′ can be extended slightly beyond these boundariesto further improve shielding the surface of substrate 10 from theelectromagnetic field of inductor 40.

Conductive plate 44′ can be connected to one of the inductor terminals(as shown in FIG. 4, in which it is connected to the rightmost inductorterminal 43), or may be left at a floating voltage level, or may beconnected to another voltage level, deciding on the system's electricaldesign.

Conductive plate 44′ is formed using the methods and material of theinvention, as later described with regard to the metal layer used toform metal interconnect 26 and inductor 40. Conductive plate 44′ isformed at the same time as connectors 44, which serve to connect thenext level metal to contact points 16, as shown in FIG. 4.

Optionally, a second polymer layer 47 may be deposited over inductor 40and interconnect structure 26, to provide additional protection of themetal structures.

Referring now to FIGS. 12-23, further details are provided for formingthe post passivation inductor (and other passive devices) of theinvention. In FIG. 12, a substrate 80 is shown, which could be anunderlying dielectric layer, and a metal contact point 81, preferablycomprising aluminum. A layer 84 of passivation has been patternedcreating an opening 82 through layer 84 that exposes the contact pad 81.Layer 86 is a layer of polymer, preferably polyimide, as earlierdescribed, deposited over the layer 84 of passivation, including theexposed surface of the contact pad. Polymer layer 86, such as polyimide,is typically spun on. For some thick layers of polymer, the polymer canbe screen printed. Alternately, a laminated dry film polymer may beused.

FIG. 13 illustrates forming an opening 87 in polymer 86, wherein thepolymer opening 87 is larger than passivation opening 82. Opening 87 isdepicted having sloped sides 85. Polymer layer 86 is exposed anddeveloped to form opening 87, which initially has vertical sidewalls.However, the subsequent curing process causes the sidewalls to have aslope 85, and a opening 87 to have a resultant partially conical shape.The sidewall slope 85 may have an angle of 45 degrees or more, and istypically between about 50 and 60 degrees. It may be possible to formthe sidewalls with an angle as small as 20 degrees.

By creating relatively large vias through the layer of polyimide orpolymer, aligned with smaller vias created through the underlying layerof passivation, aligned with underlying sub-micron metal layer, it isclear that the sub-micron metal vias can effectively be enlarged whenprogressing from the sub-micron metal layer to the level of the widemetal.

Continuing to refer to FIG. 13, one metallization system and process forforming the post passivation interconnect and inductor of the inventionis depicted. First, a glue/barrier layer 88, preferably comprising TiW,is deposited, preferably by sputtering to a thickness of between about500 and 5,000 Angstroms. A gold seed layer 90, is next sputter depositedover the glue/barrier 88, to a thickness of between about 300 and 3,000Angstroms.

Referring now to FIG. 14, a bulk layer 92 of gold (Au) is next formed byelectroplating, to a thickness of between about 1 and 20 μm.Electroplating is preceded by deposition of a thick photoresist 94 (to athickness greater than the desired bulk metal thickness), andconventional lithography to expose the gold seed layer 90 in those areaswhere electroplating thick metallization is desired.

After electroplating, photoresist 94 is removed, as shown in FIG. 15.Glue/barrier Layer 88 and gold seed layer 90 are now removed, as shownin FIG. 16, by etching, using bulk Au layer 92 as a mask. One coil ofinductor 40 is shown, but it would be understood that the completeinductor would be formed at the same time.

In another feature of the invention, polymer opening 87 may be onlypartially filled, as shown in FIGS. 17-18, which provides tight designrules for fine-pitch inductors. The design rule of polymer opening 87 istypically about 15 μm, while the metal traces of inductor are as tightas a 4 μm pitch. Therefore, patterning metal inside the polyimideopening is a very important feature of this technology.

Glue/barrier layer 88 and Au seed layer 90 are sputtered as previouslydescribed, and photoresist 95 formed as shown in FIG. 17, followed byelectroplating gold bulk layer 92. Photoresist 95 is then stripped, andthe seed layer and glue/barrier etched as previously described, and asshown in FIG. 18.

In another embodiment of the invention, copper may be used as the bulkmetal in the post-passivation metallization scheme. The FIG. 13structure is a starting point. Next, as shown in FIG. 19, a glue/barrierlayer 100 of Cr or Ti is sputter deposited to a thickness of betweenabout 200 and 2000 Angstroms. Next, a Cu seed layer 102 is sputterdeposited to a thickness of between about 2,000 and 10,000 Angstroms.Bulk layer 104 of Cu is next electroplated to a thickness of betweenabout 3 and 20 μm, also using a photoresist 94′ and conventionallithography to define the areas to be electroplated. Finally, anoptional cap layer 106 comprising Ni may also be formed, also byelectroplating, to a thickness of between about 0.1 and 3 μm.

Referring to FIG. 20, photoresist 94′ is stripped, exposing Cu seedlayer 104. Glue/barrier layer 100 and Cu seed layer 102 are now removed,as shown in FIG. 21, by etching. The bulk Cu layer 104 is used as a maskfor this etch.

If optional Ni cap layer 106 is used, it acts as an etch stop during theetching of glue/barrier 100 and seed layer 102. With the Ni cap, afaster Cu etch recipe can be used for removing the seed layer sincethere is no loss of Cu bulk in this configuration.

One coil of inductor 40 is shown, but it would be understood that thecomplete inductor would be formed at the same time.

In another feature of the invention and as earlier described, polymeropening 87 may be only partially filled, as shown in FIGS. 22-23.Glue/barrier layer 100 and Cu seed layer 102 are sputtered as previouslydescribed, and photoresist 95′ formed as shown in FIG. 22, followed byelectroplating Cu bulk layer 104 and Ni 106. Photoresist 95′ is thenstripped, and the seed layer and glue/barrier etched as previouslydescribed, and as shown in FIG. 23.

Referring now to FIG. 5 a, layers similar to earlier descriptions areshown whereby in this case no layer of polyimide has been deposited overthe layer of passivation. An inductor 19 has been created on the surfaceof layer 18 of passivation. The ohmic resistivity of the metal that isused for inductor 19 must be as low as possible. For this reason, theuse of a thick layer of, for instance, gold is preferred for theformation of inductor 19. It has been shown that a thick layer of goldincreased the Q value of inductor 19 from about 5 to about 20 for 2.4GHz applications.

The FIG. 5 a inductor may be connected to other elements in variousconfigurations, as earlier described. These include both terminals beingconnected to lower levels, as shown in FIG. 4, one up and one down asshown in FIG. 24 a, or both up as in FIG. 24 b.

An additional layer of polymer (not shown) may optionally be formed overinductor 19.

In another feature of the invention, polymer islands may be formed onlyunder the inductor coils, and not elsewhere over the passivation layer,in order to reduce the stress caused by a larger sheet of polymer. Thisis depicted in FIGS. 5 b-5 c, which are a cross-sectionalrepresentation, and top view, respectively, of inductors of theinvention formed on polymer islands. Each island may contain one or morethan one inductor, such as on the right-most island of FIG. 5 c having afirst inductor 40′ and second inductor 40′″.

Referring first to FIG. 5 b, isolated islands of polymer 20′ are formed,by depositing a polymer layer and then patterning the polymer layer toform the polymer islands. The polymer islands may also be formed byscreen printing, or by dry film lamination. The islands of polymer 20′are formed only at the location-of inductors 40′ and 40″, which areformed subsequent to polymer island formation.

The inductors 40′ and 40″ of FIG. 5 b are formed as earlier described.For illustrative purposes, inductor 40″ is shown with downward contacts41′ and 43′ connecting to metal contact points 16. Inductors 40′ areshown without contacts but could be connected upward for connection toexternal circuits, as described elsewhere.

FIG. 5 c is a top view of the inductors of the invention shown in FIG. 5b, in which the FIG. 5 b cross-section is taken along line 5 b—5 b inFIG. 5 c. It can be seen in FIG. 5 c that polymer islands 20′ areisolated from one another, and polymer is only located under inductorlocations—passivation layer 18 is exposed in all other areas of thesubstrate.

An additional protective layer of polymer (not shown) may optionally beformed over inductors 40′ and 40″.

In a similar fashion to that shown in FIGS. 5 b-5 c for inductors,polymer islands may be formed under other devices of the invention,including passive devices such as resistors and capacitors.

FIGS. 6 a-6 b depict a transformer made according to the invention. Thetransformer consists of bottom coil 60, and top coil 62, isolated by adielectric layer 47. Polymer layers 20, 47 and 64 are formed, andcomprise materials, previously described. Openings 66 are provided intop polymer layer 64 for connections to the top coil 62.

FIG. 6 b is a cross-sectional representation of a transformer of theinvention, in which the bottom coil 60 is formed directly on passivationlayer 18.

FIG. 6 c is a three-dimensional view of a solenoid structure of aninductor 19 that has been created on passivation layer 18, according tothe invention. Further highlighted in FIG. 6 c are:

-   -   23, vias that are created in the thick layer of polymer 20,        having substantially vertical metal segments    -   25, the bottom metal segments of the solenoid    -   27, the top metal segments of the solenoid.        The top and bottom metal segments 25, 27 are connected, as        shown, by the substantially vertical metal segments formed in        vias 23, to form a continuous solenoid.

FIG. 6 d is a three dimensional view of a solenoid that has been createdon a first layer 29 of polymer, having vias 23 created in a second layerof polymer.

FIG. 6 e is a top view of the solenoid of FIGS. 6 c and 6 d. Vias 23 areshown, connecting top metal segments 27 to bottom metal segments 25.

FIG. 6 f is a cross section of the structure of FIGS. 6 c-e, taken alongline 6 f—6 f′ of FIG. 6 e.

Referring now to FIGS. 6 g-6 h, a toroidal inductor 68 is shown, alsoformed according to the method and structure of the invention. In FIG. 6g, a three-dimensional view is shown, including top metal wires 27′,with vias 23′ connecting the top metal wires to the bottom metal wires25′.

FIG. 6 h shows, for further clarification, a top view of the toroidalinductor 68 of FIG. 6 g. The highlighted features of this figure havepreviously been explained and therefore do not need to be furtherdiscussed at this time.

Besides inductors, it is very useful to form other passive devices, suchas capacitors and resistors, using the method and structure of theinvention.

FIG. 7 a is a cross section of a capacitor that has been created over asubstrate 10. A layer (or layers) 14 of conductive interconnect linesand contact points 16 have been created over substrate 10. A layer 18 ofpassivation has been deposited over layer 14, with openings created inlayer 18 of passivation through which contact pads 16 can be accessed.

A capacitor contains, as is well known, a lower plate, an upper plateand a layer of dielectric that separates the upper plate from the lowerplate. FIG. 7 a includes lower plate 42, upper plate 45, and dielectriclayer 46. The upper and lower plates are formed as earlier described,using electroplated Au or Cu for the bulk metals. An optional protectivepolymer, preferably polyimide, may be formed over the capacitor.Contacts to the capacitor may be made as described earlier for inductorterminals (both down, one up and one down, or both up).

Lower plate 42 is formed to a thickness of between about 0.5 and 20 μm.Layer 46 of dielectric is between about 500 and 50,000 Angstroms. Upperplate 45 is between about 0.5 and 20 μm thick.

The post-passivation capacitor shown in cross section in FIG. 7 a has:

-   -   reduced parasitic capacitance between the capacitor and the        underlying silicon substrate    -   allowed for the use of a thick layer of conductive material for        the capacitor plates, reducing the resistance of the capacitor;        this is particularly important for wireless applications    -   can use high-dielectric-constant material such as TiO₂ or Ta₂O₅,        in addition to polymer, Si₃N₄ or SiO₂, for the dielectric        between the upper and the lower plate of the capacitor,        resulting in a higher capacitive value of the capacitor.

The capacitor of FIG. 7 a may alternately be formed above a polymerlayer (deposited over passivation 18), similar to the inductor of FIG.4.

Dielectric layer 46 is formed of a high-K dielectric material such asSi₃N₄, TEOS, Ta₂O₅, TiO₂, SrTiO₃, or SiON, which are typically depositedby CVD (Chemical Vapor Deposition).

Alternately, the dielectric layer 46 can be a polymer film, includingpolyimide, benzocyclobutene (BCB), parylene or an epoxy-based materialsuch as photoepoxy SU-8.

FIGS. 7 b-7 c show a cross section where, as in FIG. 7 a, a capacitor iscreated. In the cross section that is shown in FIG. 7 b a thick layer 20of polymer has been deposited over the surface of the passivation layer18 and has been patterned in order to make the contact pads 16accessible though the thick layer 20 of polymer. FIG. 7 b shows thepolymer vias having a smaller via diameter than the vias created throughthe layer of passivation. It is however preferred, as shown in FIG. 7 c,that larger vias be used in conjunction with smaller passivation vias.The thick layer 20 of polymer moves most of the capacitor, that is thelower plate 42, the upper plate 45 and the dielectric 46, further fromthe surface of substrate 10 by a distance equal to the thickness oflayer 20. It has previously been stated that the range of polyimidethickness can vary from 2 μm to 150 μm, depending on electrical designrequirements. This leads to a significant increase in distance betweenthe capacitor and underlying structures, including metal lines and/orthe silicon substrate, so that parasitic capacitance is significantlyreduced.

FIGS. 7 a-7 c depict both capacitor terminals being connected down to alower layer. The capacitor may also be contacted in one-up-one-downconfiguration—as shown in FIG. 25—or a two-up technique, as previouslydescribed with reference to FIG. 24 b.

Specifically relating to the cross section of FIGS. 7 a-7 c, the uppercapacitor plate 45 can be connected in an upward manner through a layerof dielectric that has been deposited over the second capacitor plate 45of FIGS. 7 a-7 c. This is further highlighted in the cross section ofFIG. 25, wherein a layer 35 of dielectric has been deposited over thecapacitor upper plate 45, with an opening 37 created through the layer35 of dielectric to expose the capacitor upper plate 45, for furtherconnection to external circuits.

The capacitor of FIGS. 7 a-7 c may optionally be covered with aprotective layer of polymer, as previously described.

FIG. 8 shows a cross section of a substrate 10 over which has beendeposited a layer 18 of passivation, with a resistor 48 formed overpassivation layer 18. A resistor, as is well known, is created byconnecting two points with a material that offers electrical resistanceto the passage of current through the material. For the creation oflayer 48 a resistive material is used, such as TaN, NiCr, NiSn, tungsten(W), TiW, TiN, Cr, Ti, TaSi or Ni. Among these resistive materials, NiCrprovides the best TCR (Temperature Coefficient of Resistance), which canbe as small as 5 ppm/° C. Resistor dimensions such as thickness, lengthand width of deposition of high resistive material 48 are applicationdependent. The resistor that is shown in cross section in FIG. 8 is, asare the capacitors of FIGS. 7 a-7 c, created in a post-passivationprocess on the surface of layer 18 of passivation.

FIGS. 9 a-9 b shows the resistor of the invention formed over a thicklayer of polymer 20, connected to contact pads 16. By increasing thedistance between the body of the resistor and the substrate (by thethickness of the polymer layer 20 and other intervening layers) theparasitic capacitance between the body of the resistor and the substrateis reduced, resulting in an improved resistive component (reducedparasitic capacitive loss, improved high frequency performance).

FIGS. 8, 9 a and 9 b show a “two-down” system for contacting theterminals of the resistor 48. The resistor may also be contacted inone-up-one-down configuration, as shown in FIG. 26, or a two-uptechnique, as previously described with reference to the inductor ofFIG. 24 b.

An additional layer of polymer, to protect the resistor, may optionallybe formed over the resistor of FIGS. 8, 9 a and 9 b.

Further applications of the post-passivation processing of the inventionare shown in FIGS. 10 and 11, which concentrate on making contact pointsbetween contact pads 16 and an overlying electric component; such as adiscrete inductor, capacitor, resistor or other passive device.Interconnect metal 50 of the invention is formed in polymer openings, aspreviously described, which are aligned with smaller passivationopenings, to connect to pads 16, and serves as an under-bump metal(UBM). Solder contact bumps are formed over UBM 50 using conventionalmethods of selective solder deposition (plating, ball mounting, orscreen printing on the surface of contacts 50), the application of aflux on the deposited solder and flowing the solder. A discrete device54 is connected to solder balls 52 and has solder 53 to facilitate theconnection. This is similar to the surface mount technology used in theassembly of printed circuit boards. The discrete electrical componentmay be, but is not limited to, devices such as inductors, capacitors orresistors.

FIG. 11 illustrates mounting of discrete device 54, using solder bumps56, and UBM 50, directly over passivation layer 18.

-   -   The discrete components of FIGS. 10 and 11 have the advantages        of performance and cost savings since the discrete component        does not have to be mounted on a Printed Circuit Board as is the        common practice in the art.

UBM 50 is formed using the metallization scheme of the invention (asshown and described with respect to FIGS. 12-23), except that when Au isused as the bulk layer, its thickness is in the range of between about0.1 and 20 um, the thinner range being preferable to avoid a high goldconcentration in the solder near the UBM/solder interface, afterprocessing.

The invention and its various features provide the advantages of:

-   -   the discrete components provide optimized parameters and can be        mounted close to the circuits, which offer true system-on-chip        performance    -   the discrete components mounting close to the circuits also        minimizes parasitics    -   the post-passivation process of the invention allows for the        selection of discrete component design parameters that result in        reduced resistance of the discrete capacitor and the discrete        inductor, this is further clear from the following comparison        between prior art processes and the processes of the invention.        Prior approaches in the art uses thinner metal for inductors,        requiring wider coils (to minimize resistance), resulting in        increased surface area, increasing the parasitic capacitance of        the inductor and causing eddy current losses in the surface of        the substrate.

The present invention by contrast, can use easily formed thick metallayers, the thickness reducing resistance. Use of polymer 20 furtherseparates the components formed from underlying structures, reducingcapacitance. With the reduced capacitance, a higher frequency ofoperation results due to a higher resonant frequency.

Although the preferred embodiment of the present invention has beenillustrated, and that form has been described in detail, it will bereadily understood by those skilled in the art that variousmodifications may be made therein without departing from the spirit ofthe invention or from the scope of the appended claims.

1. A method of forming a post passivation system, comprising: providinga semiconductor substrate, having at least one interconnect metal layerover said semiconductor substrate, and a passivation layer over the atleast one interconnect metal layer, wherein the passivation layercomprises at least one passivation opening through which is exposed atleast one top level metal contact point; forming a post-passivationmetal layer by a selective deposition process in said passivationopening and contacting said at least one top level metal contact point;forming a discrete component, overlying and connected to saidpost-passivation metal layer; wherein said at least one passivationopening is formed to a width larger than about 0.1 um.
 2. The method ofclaim 1 further comprising forming a polymer layer over said passivationlayer and under said post-passivation metal layer.
 3. The method ofclaim 2 wherein said polymer layer has at least one polymer opening,wherein said polymer opening is aligned with said passivation opening.4. The method of claim 3 wherein said polymer opening is formed largerthan said passivation opening.
 5. The method of claim 4, wherein saiddiscrete component is connected to one or more of said top level metalcontact points through said post-passivation metal layer formed throughsaid polymer opening and said passivation opening.
 6. The method ofclaim 2 wherein said polymer layer comprises polyimide, benzocyclobutene(BCB), parylene or an epoxy-based material.
 7. The method of claim 6wherein said polymer layer is deposited by spin coating.
 8. The methodof claim 6 wherein said polymer layer is deposited by screen printing.9. A The method of claim 6 wherein said polymer layer is deposited bylaminating a dry film of said polymer.
 10. The method of claim 1 whereinsaid discrete component has first and second terminals, said first andsecond terminals each being connected downward to one of said top levelmetal contact points.
 11. The method of claim 1 wherein said discretecomponent is a resistor, capacitor, or inductor.
 12. The method of claim1 wherein said at least one interconnect metal layer comprises aluminumand wherein said post-passivation metal layer material comprises gold orcopper.
 13. The method of claim 1 wherein said selective depositionprocess comprises: forming a bottom glue/barrier layer in said at leastone passivation opening; forming a seed layer over said bottomglue/barrier layer; forming a mask over said seed layer having openingswhere said post-passivation metal layer is to be formed; selectivelyforming a bulk layer over said seed layer exposed within said openings;and removing said mask.
 14. The method of claim 13 wherein said bottomglue/barrier layer comprises TiW, Cr, or Ti sputter deposited to athickness of between about 500 and 5000 Angstroms.
 15. The method ofclaim 13 wherein said seed layer comprises Au or Cu, formed bysputtering, to a thickness of between about 300 and 3000 Angstroms. 16.The method of claim 13 wherein said bulk layer comprises Au or Cu andcomprises the same material as said seed layer and is formed byelectroplating, to a thickness of between about 1 and 20 um.
 17. Themethod of claim 13 wherein said bulk layer comprises Cu and furthercomprising forming a cap layer of Ni over said bulk layer to a thicknessof between about 0.1 and 3 um.
 18. The method of claim 13 furthercomprising: forming a polymer layer over said passivation layer; formingat least one polymer opening in said polymer layer, wherein said polymeropening is aligned with said passivation opening; and forming saidbottom glue/barrier layer in said at least one passivation opening, insaid at least one polymer opening; and over said polymer layer.
 19. Amethod of forming a post passivation system, comprising: providingactive devices on a semiconductor substrate; providing fine line metalinterconnection comprising one or more layers of metals over saidsemiconductor substrate, formed by a blanket metal deposition process;providing a passivation layer over said fine line metal interconnectionwherein said passivation layer comprises at least one passivationopening through which is exposed at least one contact point on said fineline metal interconnection; forming a post-passivation metal layer,formed over said passivation layer by a selective metal depositionprocess and connected to said at least one contact point; and forming apassive device overlying and connected to said post-passivation metallayer; wherein said at least one passivation opening is formed to awidth larger than about 0.1 um.
 20. The method of claim 19 furthercomprising forming a polymer layer over said passivation layer and undersaid post-passivation metal layer.
 21. The method of claim 20 whereinsaid polymer layer has at least one polymer opening, wherein saidpolymer opening is aligned with said passivation opening.
 22. The methodof claim 20 wherein said polymer layer comprises polyimide,benzocyclobutene (BCB), parylene or an epoxy-based material.
 23. Themethod of claim 20 wherein said polymer layer is deposited by spincoating, by screen printing, or by laminating a dry film of saidpolymer.
 24. The method of claim 19 further comprising providing thick,wide metal interconnections, comprising one or more layers of saidpost-passivation metal layer, formed over said passivation layer by saidselective deposition process, and connected to at least one of saidcontact points.
 25. The method of claim 24 wherein silicon-based oxideis used as an intermetal dielectric material in said fine line metalinterconnection and wherein a polymer is used as an intermetaldielectric material in said thick, wide metal interconnections.
 26. Themethod of claim 24 wherein said fine line metal interconnection metalcomprises aluminum and wherein said post-passivation metal comprisesgold or copper.
 27. The method of claim 24 wherein said post-passivationmetal layer is formed by: forming a polymer layer over said passivationlayer; forming at least one polymer opening in said polymer layer,wherein said polymer opening is aligned with said passivation opening;forming a bottom glue/barrier layer in said at least one passivationopening, in said at least one polymer opening, and over said polymerlayer; forming a seed layer over said bottom glue/barrier layer; forminga mask over said seed layer having openings where said post-passivationmetal layer is to be formed; selectively forming a bulk layer over saidseed layer exposed within said openings; and removing said mask.
 28. Themethod of claim 27 wherein said bottom glue/barrier layer comprises TiW,Cr, or Ti sputter deposited to a thickness of between about 500 and 5000Angstroms.
 29. The method of claim 27 wherein said seed layer comprisesAu or Cu, formed by sputtering, to a thickness of between about 300 and3000 Angstroms.
 30. The method of claim 27 wherein said bulk layercomprises Au or Cu and comprises the same material as said seed layerand is formed by electroplating, to a thickness of between about 1 and20 um.
 31. The method of claim 27 wherein said bulk layer comprises Cuand further comprising forming a cap layer of Ni over said bulk layer toa thickness of between about 0.1 and 3 um.
 32. The method of claim 24wherein a first product of resistance of said thick, wide metalinterconnections and said passive device times capacitance of saidthick, wide metal interconnections and said passive device is smallerthan a second product of resistance of said fine line metalinterconnections times capacitance of said fine line metalinterconnections.
 33. The method of claim 19 wherein said passive devicecomprises a capacitor, an inductor, or a resistor.